28042900.10 |
helium |
kilogram/cubic meter |
30% |
|
|
28454000.00 |
helium-3 |
gram/million Bq |
30% |
3 |
|
28459000.40 |
A mixture containing helium-3 |
gram/million Bq |
30% |
3 |
|
84186120.10 |
Heat pumps for compression-type refrigerating units (cooled to≤23K, and heat elimination>150W, with hydrogen and helium as their media) |
set/kilogram |
90% |
3 |
|
84186920.10 |
Other compression type refrigeration equipments(cooled to≤23K, and heat elimination>150W, with hydrogen and helium as their media) |
set/kilogram |
90% |
3 |
|
90278110.00 |
Helium mass spectrometer leak detection station for integrated circuit production |
set/kilogram |
17% |
|
|